Low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 939-942

  Sheng, Lie yi ^a   Tang, Zhenan ^a   Wu, Jian ^a   Chan, Philip C H ^a   Sin, Johnny K O ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; FABRICATION; SPUTTERING; THIN FILMS;

LOWER POWER; MASKLESS TIN OXIDE SPUTTERING; MICRO HOTPLATE;

CHEMICAL SENSORS;

EID: 0030648202     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)