Bulk micromachined humidity sensor based on porous silicon

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 563-566

  O'Halloran, G M ^a   Sarro, P M ^a   Groeneweg, J ^a   Trimp, P J ^a   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ATMOSPHERIC HUMIDITY; CAPACITANCE; MICROMACHINING; POROUS SILICON; RESISTORS;

HUMIDITY SENSORS;

SILICON SENSORS;

EID: 0030658614     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)