UV-laser ablation of ultrathin dielectric layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3618, Issue , 1999, Pages 357-362

  Rubahn, K ^a   Ihlemann, J ^a   Balzer, F ^a   Rubahn, H G ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; HAFNIUM COMPOUNDS; LIGHT SCATTERING; MELTING; PHONONS; SILICA; ULTRATHIN FILMS; ULTRAVIOLET RADIATION;

HAFNIUM DIOXIDE; HEAT EVOLUTION; PHONON-PHONON SCATTERING;

LASER ABLATION;

EID: 0033359679     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)