Study on the Si-Si vibrational states of the near surface region of porous silicon

Journal of Porous Materials

Volumn 7, Issue 1, 2000, Pages 339-343

  Young, T F ^a,c   Chen, C P ^a   Liou, J F ^a   Yang, Y L ^b   Chang, T C ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b Mosel Vitelic Inc   (Taiwan)

^c NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ANODIC OXIDATION; CHEMICAL BONDS; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER BEAM EFFECTS; LATTICE VIBRATIONS; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON;

ANODIC ETCHING;

POROUS SILICON;

EID: 0033881663     PISSN: 13802224     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1009622601723     Document Type: Article

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