Flexural vibrations in piezoelectric semi-insulating GaAs

Sensors and Actuators: A. Physical

Volumn 39, Issue 2, 1993, Pages 133-139

  Söderkvist, Jan ^a   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

INSULATING MATERIALS; MICROMACHINING; PIEZOELECTRIC TRANSDUCERS; RESONATORS; THERMAL EFFECTS; VIBRATIONS (MECHANICAL);

FLEXURAL VIBRATIONS; PIEZOELECTRIC SEMI-INSULATORS; TEMPERATURE DEPENDENCE; TUNING FORK RESONATORS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0027703062     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)80210-8     Document Type: Article

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