Deep micromachining of insulating materials by etching of laterally constrained distributions of ion tracks

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 211-217

  Thornell, G ^a   Bengtsson, H ^a   Spohr, R ^a   van Veldhuizen, E J ^a   Westerberg, L ^a   Schweitz, J A ^a   Studer, B ^a   Hjort, K ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL RESONATORS; CRYSTAL STRUCTURE; ETCHING; ION BEAM LITHOGRAPHY; MICROMACHINING; QUARTZ; SUBSTRATES;

MICROMACHINING BY ION TRACK ETCHING (MITE);

ELECTRIC INSULATING MATERIALS;

EID: 0031681575     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)