Cylindrical micro-ultrasonic motor (stator transducer size: 1.4 mm in diameter and 5.0 mm long)

Ultrasonics

Volumn 38, Issue 1, 2000, Pages 33-36

  Morita, Takeshi ^a   Kurosawa, Minoru K ^b   Higuchi, Toshiro ^c  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MOTORS; EQUIVALENT CIRCUITS; MICROACTUATORS; PIEZOELECTRIC MATERIALS; STATORS; THIN FILMS; VIBRATIONS (MECHANICAL);

MICRO-ULTRASONIC MOTORS;

ULTRASONIC TRANSDUCERS;

EID: 0033871651     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(99)00141-9     Document Type: Article

References (11)

1. Trimmer W.S., et al. Sensors and Actuators. 20:1989;17-24.
2. Nakamura K., Ogura H., Maeda S., Sangawa U., Aoki S., Sato T. Proc. IEEE MEMS. 1995;374.
3. Tani K., Suzuki M., Furuta K., Sakuhara T., Ataka T. Proc. MEMS. 1998;396.
4. Flynn A.M., Tavrow L.S., Bart S.F., Brooks R.A., Ehrich D.J., Udayakumar K.R., Cross L.E. J. Microelectromech. Syst. 1:(1):1992;44.
5. Muralt P., Kohli M., Maeder T., Kholkin A., Brooks K., Setter N., Luthier T. Sensors and Actuators A. 48:1995;157.
6. Morita T., Kurosawa M.K., Higuchi T. Jpn. J. Appl. Phys. 38:(5B):1999;3347-3350.
7. Morita T., Kurosawa M., Higuchi T. Sensors and Actuators. 50:1995;75-80.
8. Morita T., Kurosawa M., Higuchi T. IEEE Trans. UFFC. 1998;1178-1187.
9. Morita T., Kanda T., Yamagata Y., Kurosawa M., Higuchi T. Jpn. J. Appl. Phys. 36:(5B):1997;2998-2999. Part 1.
10. Shimomura K., Tsurumi T., Ohba Y., Daimon M. Jpn. J. Appl. Phys. 30:(9B):1991;2174-2177.
11. Flynn A.M., Tavrow L.S., Bart S.F., Brooks R.A. Proc. IEEE Ultrasonic Symp. 1990;1163-1172.