Self-aligned mirror and V-grooves in free-space micromachined optical switches

Electronics Letters

Volumn 36, Issue 6, 2000, Pages 563-564

  Helin, P ^a   Mita, M ^a   Fujita, H ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; ETCHING; LITHOGRAPHY; MICROMACHINING; MIRRORS; OPTICAL FIBERS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SPACE OPTICS; WAVELENGTH DIVISION MULTIPLEXING;

FREE SPACE OPTICS; OPTICAL ALIGNMENT; OPTICAL INSERTION LOSSES; SELF ALIGNED MIRROR;

OPTICAL SWITCHES;

EID: 0033870914     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20000408     Document Type: Article

References (5)

1. MARXER, C., GRETILLAT, M., DE ROOIJ, N., BATTIG, R., ANTHAMATEN, O., VALK, B., and VOGEL, P.: 'Vertical mirrors fabricated by reactive ion etching for fiber optical switching applications'. Proc. MEMS'97, 1997, pp. 49-54
2. LEE, S.S., HUANG, L.S., KIM, C.J., and WU, M.: 'Free-space fibre-optic switches based on MEMS vertical torsion mirrors', J. Lightwave Technol., 1999, 17, (1), pp. 7-13
3. TOSHIYOSHI, H., and FUJITA, H.: 'Electrostatic micro torsion mirrors for an optical switch matrix', J. MEMS, 1996, 5, (4), pp. 231-237
4. LIN, L., GOLDSTEIN, E., and TKACH, R.: 'Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnects', IEEE Photonics Technol. Lett., 1998, 10, (4), pp. 525-527
5. ROSENGREN, L., SMITH, L., and BACKLUND, Y.: 'Micromachined optical planes and reflectors in silicon', Sens. Actuators A. 1994, 41-42, pp. 330-333