Structural and electrical properties of highly oriented Pb(Zr,Ti)O3 thin films deposited by facing target sputtering

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 265-269

  Li, Xin Shan ^a   Yamashita, Kaoru ^b   Tanaka, Tsunehisa ^c   Suzuki, Yoshihiko ^c   Okuyama, Masanori ^b  

^a SHANGHAI UNIVERSITY   (China)

^b OSAKA UNIVERSITY   (Japan)

^c OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; FERROELECTRICITY; LEAD COMPOUNDS; PEROVSKITE; POLARIZATION; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS;

LEAD ZIRCONATE TITANATE;

DIELECTRIC FILMS;

EID: 0033740823     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00307-6     Document Type: Article

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