Growth and characterization of radio-frequency magnetron sputtered lead zirconate titanate thin films deposited on 〈111〉 Pt electrodes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 5, 1998, Pages 2876-2884

  Ea Kim, B ^a   Aubert, P ^a   Ayguavives, F ^a   Bisaro, R ^b   Varniere, F ^a   Olivier, J ^b   Puech, M ^c   Agius, B ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b THALES   (France)

^c NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032377913     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581434     Document Type: Article

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