Low temperature microcrystalline silicon thin film resistors on glass substrates

Solid-State Electronics

Volumn 44, Issue 7, 2000, Pages 1163-1168

  Krishnan, Anand T ^a   Bae, Sanghoon ^a   Fonash, Stephen J ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ANALYSIS; CRYSTALLINE MATERIALS; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON CYCLOTRON RESONANCE; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS;

THIN FILM RESISTORS;

RESISTORS;

EID: 0033735087     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(00)00057-5     Document Type: Article

References (10)

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