Dual capacitor technique for measurement of through-plane modulus of thin polymer films

Journal of Polymer Science, Part B: Polymer Physics

Volumn 38, Issue 12, 2000, Pages 1634-1644

  Patel, Kaushal S ^a,b   Kohl, Paul A ^a   Bidstrup Allen, Sue Ann ^a  

^a Georgia Institute of Technology   (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; AROMATIC POLYMERS; CAPACITANCE MEASUREMENT; ELASTIC MODULI; MICROELECTRONIC PROCESSING; PERMITTIVITY MEASUREMENT; POLYIMIDES; STRAIN; STRESS ANALYSIS; THIN FILMS;

BENZOCYCLOBUTENE; THIN FILM STRUCTURES;

PLASTIC FILMS;

EID: 0033728670     PISSN: 08876266     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-0488(20000615)38:12<1634::AID-POLB90>3.0.CO;2-V     Document Type: Article

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