Determination of Young's modulus of thin films used in embedded passive devices

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 1997, Pages 745-749

  Djakaria, R ^a   Chandran, B I ^a   Gordon, M H ^a   Schmidt, W F ^a   Lenihan, T G ^a  

^a UNIVERSITY OF ARKANSAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELASTIC MODULI; PASSIVE NETWORKS; POLYIMIDES; SILICON WAFERS; TENSILE TESTING;

FLEXIBLE POLYIMIDE FILM; VICKERS MICROINDENTATION TECHNIQUE;

THIN FILMS;

EID: 0030654755     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)