Micro-indentation relaxation measurements in polymer thin films

Journal of Electronic Materials

Volumn 26, Issue 7, 1997, Pages 852-858

  Shinozaki, D M ^a   Lu, Y ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

Dynamic mechanical test; Microindentation; Polymer films; Polystyrene; Viscoelastic

Indexed keywords

BENDING (DEFORMATION); BOND STRENGTH (CHEMICAL); PIEZOELECTRICITY; POLYSTYRENES; SILICON WAFERS; SUBSTRATES; THIN FILMS; VISCOELASTICITY;

DYNAMIC MECHANICAL TESTING; MICROINDENTATION RELAXATION MEASUREMENTS;

PLASTIC FILMS;

EID: 0031188243     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0262-x     Document Type: Article

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