Surface composition of 4H-SiC as a function of temperature

Materials Science Forum

Volumn 338, Issue , 2000, Pages

  Bryant, K W ^a   Bozack, M J ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; GRAPHITIZATION; MASS SPECTROMETRY; SEMICONDUCTING SILICON COMPOUNDS; SUBLIMATION; SURFACE STRUCTURE; THERMAL EFFECTS;

ENERGY LOSS SPECTROSCOPY (ELS); QUADRUPOLE MASS SPECTROSCOPY (QMS);

SILICON CARBIDE;

EID: 0033703579     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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