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Journal of Applied Physics
Volumn 57, Issue 8, 1985, Pages 2771-2778
Studies of SiC formation on Si (100) by chemical vapor deposition
(4)
Bozso, F
a
Yates Jr , J T
a
Choyke, W J
a
Muehlhoff, L
a
a
UNIVERSITY OF PITTSBURGH
(
United States
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
0345040371
PISSN
:
00218979
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.335420
Document Type
:
Article
Times cited : (
108
)
References (
35
)
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