Surface modification of aluminium by plasma immersion ion implantation

Surface and Coatings Technology

Volumn 128-129, Issue 1, 2000, Pages 249-255

  Manova, D ^a   Huber, P ^a   Mandl S ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

Aluminium; Aluminium nitride; Diffusion; PIII; RBS; X Ray diffraction

Indexed keywords

ACTIVATION ENERGY; ALUMINUM COMPOUNDS; ION IMPLANTATION; SECONDARY ION MASS SPECTROMETRY; SOLUBILITY; STOICHIOMETRY; THERMAL DIFFUSION IN SOLIDS; THICK FILMS; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE; PHASE FORMATION; PLASMA IMMERSION ION IMPLANTATION;

SURFACE TREATMENT;

EID: 0033703255     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00581-8     Document Type: Article

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