Contactless mapping of lifetime and diffusion length scan map of minority carriers in silicon wafers

EPJ Applied Physics

Volumn 10, Issue 2, 2000, Pages 157-162

  Palais, O ^a   Gervais, J ^a   Yakimov, E ^a   Martinuzzi, S ^a  

^a Lab Biol Anim Univ P   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; COAXIAL CABLES; CRYSTAL DEFECTS; DEEP LEVEL TRANSIENT SPECTROSCOPY; DIFFUSION IN SOLIDS; INDUCED CURRENTS; MICROWAVE MEASUREMENT; NONDESTRUCTIVE EXAMINATION; OPTICAL MATERIALS; PHASE SHIFT; SEMICONDUCTOR LASERS; SINGLE CRYSTALS;

CONTACTLESS MICROWAVE PHASE SHIFT TECHNIQUE; MINORITY CARRIERS;

SILICON WAFERS;

EID: 0033702079     PISSN: 12860042     EISSN: None     Source Type: Journal    
DOI: 10.1051/epjap:2000128     Document Type: Article

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