Properties and decomposition behaviors of reactively sputtered Pt(O) electrode materials

Materials Research Society Symposium - Proceedings

Volumn 596, Issue , 2000, Pages 57-65

  Saenger, K L ^a   Rossnagel, S M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; AMORPHOUS MATERIALS; ANNEALING; CRYSTAL ORIENTATION; DECOMPOSITION; ELECTRODES; MORPHOLOGY; NITROGEN; OXYGEN; SPUTTERING; TEMPERATURE; TEXTURES;

AMORPHOUS PLATINUM OXIDE; OXYGEN CONTENT;

PLATINUM COMPOUNDS;

EID: 0033680180     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

1. J.H. Joo, J.M. Seon, Y.C. Jeon, K.Y. Oh, J.S. Roh, and J.J. Kim, Appl. Phys. Lett. 70 3053 (1997).
2. Y. Tsunemine, T. Okudaira, K. Kashihar, K. Hanafusa, A. Yutani, Y. Fujita, M. Matsushita, H. Itoh, and H. Miyoshi, Proc. IEEE International Electron Devices Meeting Technical Digest 811 (1998).
3. B. Soo Lee and J.Y. Lee, Jpn. J. Appl. Phys. 38 L870 (1999).
4. T. Nakamura, Y. Nakao, A. Kamisawa, and H. Takasu, Appl. Phys. Lett. 65 1522 (1994);
5. T. Nakamura, Y. Fujimori, N. Izumi, and A. Kamisawa, Jpn. J. Appl. Phys. 37 1325 (1998).
6. H. Fujisawa, S. Hyodo, K. Jitsui, M. Shimizu, H. Niu, H. Okino, and T. Shiosaki, Integrated Ferroelectrics 21 107 (1998).
7. M. Hecq, A. Hecq, and J.P. Delrue, T. Robert, J. Less-Common Met. 64 25 (1979).
8. J.R. McBride, G.W. Graham, C.R. Peters, and W.H. Weber, J. Appl. Phys. 69 1596 (1991).
9. H. Neff, S. Henkel, E. Hartmannsgruber, E. Steinbeiss, W. Michalke, K. Steenbeck, and H.G. Schmidt, J. Appl. Phys. 79 7672 (1996).
10. Y. Abe, H. Yanagisawa, and K. Sasaki, Jpn. J. Appl. Phys. 37 4482 (1998).
11. D.Y. Park, D.S. Lee, M.H. Kim, T.S. Park, H.J. Woo, E. Yoon, D.I. Chun, and J. Ha, Mat. Res. Soc. Symp. Proc. 441 335 (1997);
12. M.H. Kim, T.S. Park, D.S. Lee, E. Yoon, D.Y. Park, H.J. Woo, D.I. Chun, and J. Ha, J. Mater. Res. 14 634 (1999);
13. M.H. Kim, T.S. Park, E. Yoon, D.S. Lee, D.Y. Park, H.J. Woo, D.I. Chun, and J. Ha, J. Mater. Res. 14 1255 (1999).
14. Handbook of Chemistry and Physics, 67th ed, edited by R.C. Weast (CRC, Boca Raton, FL, 1986).
15. D. Cahen, J.A. Ibers, and J.B. Wagner, Jr., Inorganic Chemistry 13 1377 (1974).
16. K.L. Saenger and P.A. Andricacos, unpublished.
17. D.S. Lee, D.Y. Park, M.H. Kim, D.I. Chun, J. Ha, and E. Yoon, Mat. Res. Soc. Symp. Proc. 441 341 (1997);
18. D.S. Lee, D.I. Chun, D.Y. Park, J.W. Ha, E.J. Yoon, M.H. Kim, H.J. Woo, U.S. Patent No. 5 736 422 (7 April 1998).