Evaluation of conductive region in PZT film induced by low temperature hydrogen treatment on PT/PZT/PT capacitor

Materials Research Society Symposium - Proceedings

Volumn 596, Issue , 2000, Pages 115-120

  Kanaya, Hiroyuki ^a   Kumura, Yoshinori ^a   Kunishima, Iwao ^a   Tanaka, Shin Ichi ^a   Iwamoto, Tsuyoshi ^a   Takahagi, Yukio ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; GRAIN BOUNDARIES; HYDROGEN; INTERFACES (MATERIALS); LEAD COMPOUNDS; LEAKAGE CURRENTS; PLASMA APPLICATIONS; SECONDARY ION MASS SPECTROMETRY;

HYDROGEN PLASMA TREATMENT; LEAD ZIRCONATE TITANATE;

FERROELECTRIC MATERIALS;

EID: 0033680080     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Y. Fujisaki, K. Kushida-Abdelfhafar, Y. Shimamoto, and H. Miki, J. Appl. Phys. 82, 341 (1997)
2. Y. Shimamoto, K. Kushida-Abdelfhafar, H. Miki, and Y. Fujisaki, Appl. Phys. Lett. 70, 3096 (1997)
3. K. Kushida-Abdelfhafar, H. Miki, F. Yano, and Y. Fujisaki, Jpn. J. Appl. Phys. 36, L1032 (1997)
4. H. Kanaya, T. Iwamoto, I. Kunishima, S. Tanaka, Y. Takahagi, to be published. ISIF'99