Coaxial rf-magnetron nitrogen activator for GaN MBE growth

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 59, Issue 1-3, 1999, Pages 60-64

  Jmerik, V N ^a   Mamutin, V V ^a   Vekshin, V A ^a   Shubina, T V ^a   Ivanov, S V ^a   Kop'ev, P S ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC EXCITATION; EPITAXIAL GROWTH; GALLIUM COMPOUNDS; IONS; MAGNETIC FIELD EFFECTS; MOLECULAR BEAM EPITAXY; MOLECULES; NATURAL FREQUENCIES; NITROGEN; PLASMAS; SUBSTRATES;

COMPACT COAXIAL MAGNETRON NITROGEN ACTIVATOR; OPTICAL EMISSION SPECTRA; PLASMA SOURCE; RADIO FREQUENCY CAPACITIVELY COUPLED DISCHARGE;

MAGNETRONS;

EID: 0033528924     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00368-7     Document Type: Article

References (16)

1. Davis R.F., Paisley M.J., Sitar Z. et al. J. Crystal Growth. 178:1997;87.
2. Hughes W.C., Rowland W.H. Jr., Johnson M.A.L., Fujita S., Cook J.W. Jr., Schetzina J.F., Ren J., Edmond J.A. J. Vac. Sci. Technol. B. 13:1995;1571.
3. Newman N. J. Crystal Growth. 178:1997;102.
4. Y. Saeki, T. Akitsu, T. Kato, T. Matsumoto, in: Proceedings of the First International Symposium on Blue Laser and Light Emitting Diodes, Chiba University, Japan, March 5-7, 1996, p. 390.
5. Zhmerik V.N., Ivanov S.V., Maximov M.V. et al. Semiconductors. 30(6):1996;568.
6. T. Shubina, S. Ivanov, N. Shmidt, S. Sorokin, A. Toropov I. Krestnikov, G. Pozina, B. Monemar, P. Kop'ev, in: Workbook of Int. European Workshop on MBE, Oxford, April 1997, p. 37.
7. Drozdov S.V., Kipshidze G.D., Lebedev V.B. et al. Semiconductors. 30(7):1996;690.
8. Y.P. Raizer, M.N. Shneider, N.A. Yatsenko, Radio-Frequency Capacitive Discharges, CRC Press, New York, 1995.
9. Yeom G.Y., Thornton J.A., Kushner M.J. J. Appl. Phys. 65:1989;3816.
10. Molnar R.G., Moustakas T.D. J. Appl. Phys. 76:1994;4587.
11. N. Matsumura, K. Yamawaki, A. Ikehara, J. Saraie, in: Proceedings of the First International Symposium on Blue Laser and Light Emitting Diodes, Chiba University, Japan, March 5-7, 1996, p. 297.
12. Yao T., Zhu Z., Wu Y.H., Song C.D., Nishiyama F., Kimura K., Kajiyma H., Miwa S., Yasuda T. J. Crystal Growth. 159:1996;214.
13. Catherinot A., Sy A. Phys. Rev. A. 20:1979;1511.
14. -D.I. Slovetski, Mechanism of Chemical Reactions in Nonequilibrium Plasma, Moscow, 1980 (in Russian).
15. Bibinov N.K., Bolshukhin D.O., Bratsev V.F., Kokh D.B., Ochkur V.I., Vinogradov I.P., Wiesemann K. Rev. Sci. Instr. 69:1998;1200.
16. Brunet H., Vincent P. J. Appl. Phys. 50:1979;4708.