Oxygen implanted silicon investigated by positron annihilation spectroscopy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 294-299

  Kruseman, A C ^a   Schut, H ^a   Van Veen, A ^a   Fujinami, M ^b,c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NIPPON STEEL CORPORATION   (Japan)

^c KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Doppler broadening; Positron annihilation; Silicon; SIMOX

Indexed keywords

ANNEALING; DEFECTS; ELECTRIC INSULATING MATERIALS; ION IMPLANTATION; OXYGEN; POSITRONS; THERMAL EFFECTS;

POSITRON ANNIHILATION SPECTROSCOPY; SEPARATION BY IMPLANTATION OF OXYGEN (SIMOX);

SILICON WAFERS;

EID: 0033513937     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00844-1     Document Type: Article

References (14)

1. A.G. Revesz, H.L. Hughes, Microele. Eng. 36 (1997) 343.
2. P. Mascher, S. Dannefaer, D. Kerr, Phys. Rev. B 40 (1989) 11764.
3. A. Ikari, H. Haga, A. Uedono, Y. Ujihira, O. Yoda, Jpn. J. Appl. Phys. 33 (1994) 1723.
4. A. Uedono, Y.K. Cho, S. Tanigawa, A. Ikari, Jpn. J. Appl. Phys. 33 (1994) 1.
5. M. Clement, J.M.M. de Nijs, H. Schut, A. van Veen, P. Balk, J. Appl. Phys. 79 (1996) 9029.
6. S. Dannefaer, Phys. Status Solidi A 102 (1987) 481.
7. M. Fujinami, Phys. Rev. B 53 (1996) 13047.
8. M. Fujinami, Mater. Sci. Forum 255-257 (1997) 218.
9. M. Alatalo, B. Barbiellini, M. Hakala, H. Kauppinen, T. Korhone, M.J. Puska, K. Saarinen, P. Hautojärvi, R.M. Nieminen, Phys. Rev. B 54 (1996) 239.
10. P. Asoka-Kumar, M. Alatalo, V.J. Ghosh, A.C. Kruseman, B. Nielsen, K.G. Lynn, Phys. Rev. Lett. 77 (1996) 2097.
11. A. van Veen, H. Schut, J. de Vries, R.A. Hakvoort, M.R. IJpma, AIP Conf. Proc. vol. 218, AIP, New York, 1990, p. 171.
12. B. Nielsen, O.W. Holland, T.C. Leung, K.G. Lynn, J. Appl. Phys. 74 (1993) 1636.
13. A.C. Kruseman, H. Schut, A. van Veen, P.E. Mijnarends, M. Clement, J.M.M. de Nijs, Appl. Surf. Sci. 116 (1997) 192.
14. A.C. Kruseman, H. Schut, M. Fujinami, A. van Veen, Mater. Sci. Forum 255-257 (1997) 793.