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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 116-120

The effects of island diffusion and breakup in island growth during ion-beam assisted deposition

(4) Rusanen, M a Koponen, I a Heinonen, J a Sillanpaa J a

a UNIVERSITY OF HELSINKI (Finland)

Author keywords

IBAD; Island growth; Scaling; Simulations

Indexed keywords

AGGLOMERATION; COMPUTER SIMULATION; CRYSTAL DEFECTS; DEPOSITION; DIFFUSION IN SOLIDS; FILM GROWTH; ION BEAMS;

ION BEAM ASSISTED DEPOSITION (IBAD);

ION BOMBARDMENT;

EID: 0033513814 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(98)00754-X Document Type: Article

Times cited : (13)

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