Island growth in ion beam assisted metal-on-metal deposition modelled by rate equations

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 142, Issue 1-2, 1998, Pages 67-76

  Sillanpää, Jussi ^a   Koponen, Ismo ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIFFUSION; ION BEAMS; ION BOMBARDMENT; MATHEMATICAL MODELS; METALS; THIN FILMS;

DIFFUSION DRIVEN AGGREGATION; ION BEAM ASSISTED DEPOSITION; ISLAND FRAGMENTATION; ISLAND GROWTH; METAL ON METAL DEPOSITION;

FILM GROWTH;

EID: 0032091469     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00224-9     Document Type: Article

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