Monte Carlo simulations of ion-enhanced island coarsening

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 225-229

  Chason, Eric ^a   Kellerman, Bruce K ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b MEMC Electronic Materials Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEFECTS; DEPOSITION; MONTE CARLO METHODS; RADIATION EFFECTS; SURFACE PHENOMENA; SURFACE TREATMENT; THERMAL EFFECTS;

ION ENHANCED ISLAND COARSENING; ION FLUXES;

ION BOMBARDMENT;

EID: 0031547938     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00889-0     Document Type: Article

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