Ion beam induced modifications in dc sputtered TiN/B-C-N multilayers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 198-202

  Fayeulle, S ^a   Torri, P ^b   Nastasi, M ^c   Lu, Y C ^c   Kung, H ^c   Tesmer, J R ^c  

^a ECOLE CENTRALE DE LYON   (France)

^b UNIVERSITY OF HELSINKI   (Finland)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BORON COMPOUNDS; CRYSTAL STRUCTURE; INTERDIFFUSION (SOLIDS); ION BOMBARDMENT; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; STRESS RELAXATION; TENSILE STRENGTH; THIN FILMS; TITANIUM NITRIDE; X RAY CRYSTALLOGRAPHY;

BILAYER REPEAT LENGTH;

MULTILAYERS;

EID: 0031547884     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00885-3     Document Type: Article

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