Stress-related interdiffusion in dc sputtered TiN/B-C-N multilayers

Applied Physics Letters

Volumn 73, Issue 8, 1998, Pages 1077-1079

  Fayeulle, S ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011733432     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122089     Document Type: Article

References (20)

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