Kinetics of platinum suicide formation followed in situ by spectroscopic ellipsometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 144-149

  Zhou, S M ^a,c   Hundhausen, M ^c   Stark, T ^c   Chen, L Y ^b,c   Ley, L ^c  

^a JOHNS HOPKINS UNIVERSITY   (United States)

^b FUDAN UNIVERSITY   (China)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033481693     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581564     Document Type: Article

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