Ultralow-stress silicon-rich nitride films for microstructure fabrication

Sensors and Materials

Volumn 11, Issue 6, 1999, Pages 349-358

  Cheng, Ming Cheng ^a   Chang, Chin Piao ^a   Huang, Wen Sheh ^a   Huang, Ruey Shing ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Low stress membrane; MEMS materials; Silicon rich nitride

Indexed keywords

EID: 0033474323     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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