Determining thickness of thin metal films with spectroscopic ellipsometry for applications in magnetic random-access memory

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1297-1302

  Tompkins, Harland G ^a   Zhu, Theodore ^a   Chen, Eugene ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007075874     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581277     Document Type: Article

References (11)

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