Studies of metallic multilayer structures, optical properties, and oxidation using in situ spectroscopic ellipsometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 429-435

  Gao, Xiang ^a   Hale, Jeff ^b   Heckens, Scott ^a   Woollam, John A ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELLIPSOMETRY; FEEDBACK CONTROL; FILM GROWTH; MAGNETIC PROPERTIES; MAGNETRON SPUTTERING; METALLIC FILMS; NONDESTRUCTIVE EXAMINATION; OPTICAL PROPERTIES; OXIDATION; X RAY DIFFRACTION;

METALLIC MULTILAYER; SPECTROSCOPIC ELLIPSOMETRY;

MULTILAYERS;

EID: 0032025180     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581094     Document Type: Article

References (13)

1. M. N. Baibich, J. M. Broto, A. Fert, F. Nguyen Van Dau, F. Petroff, P. Etienne, G. Creuzet, A. Friederich, and J. Chazelas, Phys. Rev. Lett. 61, 2472 (1988).
2. W. F. Eggelhoff, Jr., T. Ha, R. D. K. Misra, Y. Kadmon, J. Nir, C. J. Powell, M. D. Stiles, R. D. McMichael, C.-L. Lin, J. M. Sivertsen, J. H. Judy, K. Takano, A. E. Berkowitz, T. C. Anthony, and J. A. Brug, J. Appl. Phys. 78, 273 (1995).
3. D. H. Mosca, F. Petroff, A. Fert, and P. A. Schroeder, J. Magn. Magn. Mater. 94, L1 (1991).
4. A. Chaiken, R. P. Michel, and M. A. Wall, Phys. Rev. B 53, 5518 (1996).
5. W. A. McGahan and J. A. Woollam, Appl. Phys. Commun. 9, 1 (1989).
6. C. F. Majkrzak, J. F. Ankner, N. F. Berk, and D. Gibbs, Magnetic Multilayers, edited by L. H. Bennett and R. E. Watson (World Scientific, Singapore, 1994), p. 299.
7. J. A. Woollam, X. Gao, S. Heckens, and J. N. Hilfiker, Proc. SPIE 2873, 140 (1996).
8. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977), Chap. 4.
9. G. E. Jellison, Jr., Appl. Opt. 30, 3354 (1991).
10. R. W. Collins, Rev. Sci. Instrum. 61, 2029 (1990).
11. E. A. Irene and J. A. Woollam, MRS Bull. 24 (1995).
12. B. Johs, C. Herzinger, J. H. Dinan, A. Cornfeld, J. D. Benson, D. Doctor, E. Olson, I. Ferguson, M. Pelczynski, P. Chow, C. H. Kuo, and S. Johnson, Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry; Thin Solid Films (in press).
13. Handbook of Optical Constants of Solids, edited by E. Palik (Academic, Orlando, 1985), Chap. 5.