Five layer stack of nitride, oxide, and amorphous silicon on glass, analyzed with spectroscopic ellipsometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 992-997

  Tompkins, Harland G ^a   Williams, Phillip H ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005369635     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580793     Document Type: Article

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