MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3513, Issue , 1998, Pages 210-222

  Tabib Azar, Massood ^a   Sutapun, Boonsong ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TUNNELING; MICROOPTICS; OPTICAL SENSORS; OPTOELECTRONIC DEVICES; PHOTONS; TUNNEL JUNCTIONS;

MICROOPTOELECTROMECHANICAL SENSORS (MOEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0032301730     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)