Planar-assembly triaxial microaccelerometer with electromechanical sigma-delta ADCs

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 436-440

  Wuestling, S ^a   Fromhein, O ^a   Gemmeke, H ^a   Tschuch, M ^a   Wollersheim, O ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Electromechanics; Microaccelerometers; Sigma delta analog digital converters

Indexed keywords

ACCELEROMETERS; ANALOG TO DIGITAL CONVERSION; APPLICATION SPECIFIC INTEGRATED CIRCUITS; COMPUTER SIMULATION; DELTA MODULATION; DIGITAL FILTERS; DIGITAL SIGNAL PROCESSING; MODULATORS; READOUT SYSTEMS; SENSORS;

MICROACCELEROMETERS; SIGMA DELTA ANALOGUE TO DIGITAL CONVERTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031164609     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80302-0     Document Type: Article

References (3)

1. J.C. Candy, Decimation for sigma delta modulation, IEEE Trans. Commun., COM-34 (1986) 72-76.
2. M. Strohrmann, P. Bley, O. Fromhein and J. Mohr, Acceleration sensor with integrated compensation of temperature effects fabricated by the LIGA process, Sensors and Actuators A, 41-42 (1994) 426-429.
3. S. Wuestling, O. Fromhein and H. Gemmeke, Synergie von Elektronik und Mikromechanik am Beispiel eines Beschleunigungssensors, Tagungsband 3. Workshop Methoden und Werkzeuge zum Entwurf von Mikrosystemen, Frankfurt a.M., Germany, 27-28 June, 1996, pp. 176-183.