Oxidized porous silicon: A new approach in support thermal isolation of thermopile-based biosensors

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 205-210

  Lysenko, V ^a,b,c   Roussel, Ph ^b   Delhomme, G ^b   Rossokhaty, V ^a   Strikha, V ^a   Dittmar, A ^b   Barbier, D ^b   Jaffrezic Renault, N ^c   Martelet, C ^c  

^a TARAS SHEVCHENKO NATIONAL UNIVERSITY OF KYIV   (Ukraine)

^b INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^c ECOLE CENTRALE DE LYON   (France)

Author keywords

Porous silicon; Thermal biosensors; Thermal isolation

Indexed keywords

BIOSENSORS; THERMAL INSULATION;

THERMAL BIOSENSORS;

POROUS SILICON;

EID: 0043286542     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01777-9     Document Type: Article

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