Laser release process to obtain freestanding multilayer metal-polyimide circuits

IBM Journal of Research and Development

Volumn 41, Issue 1-2, 1997, Pages 151-157

  Doany, F E ^a,b,c,d,e   Narayan, C ^a,e,f,g,h  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b HAVERFORD COLLEGE   (United States)

^c UNIVERSITY OF PENNSYLVANIA   (United States)

^d CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^e Society for Information Display   (United States)

^f INDIAN INSTITUTE OF TECHNOLOGY   (India)

^g LEHIGH UNIVERSITY   (United States)

^h IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; EXCIMER LASERS; METALLIC FILMS; MICROELECTRONIC PROCESSING; POLYIMIDES; SUBSTRATES;

FREESTANDING POLYIMIDE FILMS; LASER RELEASE PROCESS;

THIN FILM CIRCUITS;

EID: 0030677684     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.411.0151     Document Type: Article

References (8)

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2. R. Srinivasan and V. Mayne-Banton, "Self-Developing Photoetching of Poly(ethylene terephthalate) Films by Far-Ultraviolet Excimer Laser Radiation," Appl. Phys. Lett. 41, No. 6, 575-578 (1982).
3. R. Srinivasan and B. Braren, "Ultraviolet Laser Ablation of Organic Polymers," Chem. Rev. 89, 1303-1316 (1989).
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5. N. J. Naclerio, "ARPA Packaging Strategy," presented at the International Conference on MCMS, Denver, CO, 1993.
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7. C. Narayan and S. Purushothaman, "Thin Film Transfer Process for Low Cost MCM's," Proceedings of the IEEE/CHMT-EIA, Santa Clara, CA, 1993, pp. 373-380.
8. J. Paraszczak, J. Cataldo, E. Galligan, W. Graham, R. McGouey, S. Nunes, R. Serino, D. Y. Shih, E. Babich, A. Deutsch, G. Kopcsay, R. Goldblatt, D. Hofer, J. Labadie, J. Hedrick, C. Narayan, K. Saenger, J. Shaw, V. Ranieri, J. Ritsko, L. Rothman, W. Volksen, J. Wilczynski, D. Witman, and H. Yeh, "Fabrication and Performance Studies of Multilayer Polymer/Metal Interconnect Structures for Packaging Applications," Proceedings of the 41st Electronic Components and Technology Conference, Atlanta, GA, May 13-15, 1991, pp. 362-369.