Characterization of the anisotropic chemical attack of {hk0} silicon plates in a T.M.A.H. solution. Determination of a database

Sensors and Actuators, A: Physical

Volumn 77, Issue 2, 1999, Pages 81-97

  Charbonnieras, A R ^a   Tellier, C R ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CHEMICAL ATTACK; DATABASE SYSTEMS; ETCHING; MATHEMATICAL MODELS; SILICON; SURFACES; WATER;

ANISOTROPIC ETCHANTS; ETCHING SHAPES; SILICON PLATES;

CHEMICAL SENSORS;

EID: 0033349916     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00020-5     Document Type: Article

References (25)

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