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Volumn 518, Issue , 1998, Pages 67-72
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Curvature of a cantilever beam subjected to an equi-biaxial bending moment
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Author keywords
[No Author keywords available]
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Indexed keywords
BENDING MOMENTS;
ELASTIC MODULI;
FINITE ELEMENT METHOD;
MICROELECTROMECHANICAL DEVICES;
NUMERICAL ANALYSIS;
RESIDUAL STRESSES;
THIN FILM DEVICES;
BIAXIAL MODULUS;
EQUI BIAXIAL BENDING MOMENT;
CANTILEVER BEAMS;
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EID: 0032301941
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-518-67 Document Type: Conference Paper |
Times cited : (12)
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References (9)
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