Direct observation of platinum etching during the fluorination of a Pt/LaF3/Si structure

Physica Status Solidi (A) Applied Research

Volumn 176, Issue 2, 1999, Pages 943-952

  Nefedov, A ^a   Fanchenko, S ^a   Sbitnev, S ^a   Heyde, M ^b   Rademann, K ^b   Bartholomaus L ^b   Roth, U ^a   Moritz, W ^a  

^a KURCHATOV INSTITUTE   (Russian Federation)

^b HUMBOLDT UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; FLUORINE; INTERFACES (MATERIALS); PLATINUM; SANDWICH STRUCTURES; SURFACE ROUGHNESS; X RAY CRYSTALLOGRAPHY;

QUARTZ CRYSTAL MICROBALANCE (QCM); SEEMAN-BOHLIN X-RAY DIFFRACTOMETERS;

MULTILAYERS;

EID: 0033341517     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199912)176:2<943::AID-PSSA943>3.0.CO;2-4     Document Type: Article

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