High resolution X-ray scattering investigation of Pt/LaF3/Si(1 1 1) structures

Physica B: Condensed Matter

Volumn 248, Issue 1-4, 1998, Pages 48-52

  Fanchenko, S S ^a   Jedrecy, N ^b   Moritz, W ^c   Nefedov, A A ^a  

^a KURCHATOV INSTITUTE   (Russian Federation)

^b SYNCHROTRON SOLEIL   (France)

^c HUMBOLDT UNIVERSITY   (Germany)

Author keywords

Pt LaF3 Si samples; X ray scattering

Indexed keywords

CRYSTAL ORIENTATION; ELECTROMAGNETIC WAVE DIFFRACTION; ELECTROMAGNETIC WAVE SCATTERING; LANTHANUM COMPOUNDS; PLATINUM; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SURFACE ROUGHNESS; TEXTURES; X RAY CRYSTALLOGRAPHY;

ASYMPTOTIC BRAGG DIFFRACTION; GRAZING INCIDENCE X RAY DIFFRACTION (GIXD) ANALYSIS; LANTHANUM FLUORIDE; SMALL ANGLE X RAY SCATTERING (SAXS) ANALYSIS;

SEMICONDUCTOR METAL BOUNDARIES;

EID: 0032092065     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(98)00201-4     Document Type: Article

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