Interface chemistry of WN/4H-SiC structures

Applied Surface Science

Volumn 151, Issue 3, 1999, Pages 225-232

  Kakanakova Georgieva, A ^a   Kassamakova, L ^b   Marinova, Ts ^a   Kakanakov, R ^b   Noblanc, O ^c   Arnodo, C ^c   Cassette, S ^c   Brylinski, C ^c  

^a INSTITUTE OF GENERAL AND INORGANIC CHEMISTRY   (Bulgaria)

^b Central Laboratory of Applied Physics Bulgarian Academy of Sciences   (Bulgaria)

^c THALES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DEPOSITION; DIFFUSION IN SOLIDS; ELECTRIC PROPERTIES; ELECTRIC VARIABLES MEASUREMENT; HIGH TEMPERATURE EFFECTS; NITROGEN; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; TUNGSTEN COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILING; IDEALITY FACTOR; TUNGSTEN NITRIDE;

INTERFACES (MATERIALS);

EID: 0033340175     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00277-9     Document Type: Article

References (16)

1. Lundberg N., Ostling M., Tagtstrom P., Jansson U. J. Electrochem. Soc. 143:1996;1662.
2. Geib K., Wilson C., Long R., Wilmsen C. J. Appl. Phys. 68:1990;2796.
3. Papanicolaou N., Christou A., Gipe M. J. Appl. Phys. 65:1989;3526.
4. M. Zeller, J. Bellina, N. Saha, J. Filar, J. Hardraeves, H. Will, Materials Research Society, Symposia Proceedings 97, 1988, 283.
5. C. Arnodo, S. Tyc, F. Wyczisk, C. Brylinski, Inst. Phys. Conf. Ser No. 142, Chap. 3, p. 577.
6. Chaudhry M., Berry W., Zeller M. Int. J. Electron. 71:1991;439.
7. Hara S., Suzuki K., Furuya A., Mmatsui Y., Ueno T., Ohdomari I., Misawa S., Sakuma E., Yoshida S., Ueda Y., Suzuki S. Jpn. J. Appl. Phys. 29:1990;L394.
8. Arugu D., Harris G., Taylor C. Electron. Lett. 31:1995;678.
9. Mizokawa Y., Nakanishi S., Miyase S. Jpn. J. Appl. Phys. 28:1989;2576.
10. Porter L., Davis R., Bow J., Kim M., Carpenter R., Glass R. J. Mater. Rres. 10:1995;668.
11. Chow T., Ghezzo M. Materials Research Society, Symposium Proceedings. 423:1996;9.
12. E. Mokhov, A. Roenkov, Y. Vodakov, G. Saparin, S. Obyden, Inst. Phys. Conf. Ser. No. 142, Chap. 1, p. 245.
13. Kakanakova-Georgieva A., Marinova Ts., Noblanc O., Arnodo C., Cassette S., Brylinski C. Appl. Surf. Sci. 121-122:1997;208.
14. Kassamakova L., Kakanakova-Georgieva A., Kakanakov R., Marinova Ts., Kassamakov I., Djambova Tz., Noblanc O., Arnodo C., Cassette S., Brylinski C. Semicond. Sci. Technol. 13:1998;1025.
15. Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer, 1994.
16. Noblanc O., Arnodo C., Cassette S., Brylinski C., Kakanakova-Georgieva A., Marinova T., Kassamakova L., Kakanakov R., Pecz B., Sulyok A., Radnoczi G. Mater. Sci. Forum. 264-268:1998;817.