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Volumn 121-122, Issue , 1997, Pages 208-212
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Interface chemistry of a Ti/Au/Pt/Ti/SiC structure
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Author keywords
Diffusion processes; Interface reactions; Metallization; Silicon carbide; XPS
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Indexed keywords
ANNEALING;
DISSOCIATION;
GOLD;
INTERDIFFUSION (SOLIDS);
METALLIZING;
PLATINUM;
SILICON CARBIDE;
SURFACE STRUCTURE;
TITANIUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
INTERFACE CHEMISTRY;
INTERFACES (MATERIALS);
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EID: 0031549674
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(97)00290-0 Document Type: Article |
Times cited : (6)
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References (9)
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