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Volumn 207, Issue 1, 1999, Pages 15-19

Thermodynamic analysis of growth rate reduction by VCl4 during metalorganic vapor-phase epitaxy of GaAs

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; GIBBS FREE ENERGY; LASER APPLICATIONS; LIGHT REFLECTION; METALLORGANIC VAPOR PHASE EPITAXY; REFLECTOMETERS; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; THERMAL EFFECTS; VANADIUM COMPOUNDS;

EID: 0033328953     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(99)00349-8     Document Type: Article
Times cited : (8)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.