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Volumn 207, Issue 1, 1999, Pages 15-19
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Thermodynamic analysis of growth rate reduction by VCl4 during metalorganic vapor-phase epitaxy of GaAs
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
GIBBS FREE ENERGY;
LASER APPLICATIONS;
LIGHT REFLECTION;
METALLORGANIC VAPOR PHASE EPITAXY;
REFLECTOMETERS;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR GROWTH;
THERMAL EFFECTS;
VANADIUM COMPOUNDS;
LASER REFLECTOMETRY;
VANADIUM TETRACHLORIDE;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0033328953
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(99)00349-8 Document Type: Article |
Times cited : (8)
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References (13)
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