Extraction of the coefficient of thermal expansion of thin films from buckled membranes

Materials Research Society Symposium - Proceedings

Volumn 546, Issue , 1999, Pages 103-108

  Ziebart, V ^a,b   Paul, O ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; THERMAL EFFECTS; THERMAL EXPANSION; THIN FILMS;

COEFFICIENT OF THERMAL EXPANSION (CTE);

SEMICONDUCTING FILMS;

EID: 0033324417     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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