Micromachined acoustic Fabry-Perot system for distance measurement

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 643-648

  Hornung, M ^a   Brand, O ^a   Paul, O ^a   Baltes, H ^a   Kuratli, C ^a   Huang, Q ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DISTANCE MEASUREMENT; MICROMACHINING; RESONATORS; ULTRASONIC TRANSMISSION;

ACOUSTIC FABRY PEROT SYSTEMS; ACOUSTIC RESONANCE;

PROXIMITY SENSORS;

EID: 0031707601     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)