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Volumn 442, Issue 3, 1999, Pages 442-454
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Thermal and electron-induced reactions of AsCl3 on GaAs(100)
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
ARSENIC COMPOUNDS;
AUGER ELECTRON SPECTROSCOPY;
CHEMISORPTION;
DESORPTION;
DISSOCIATION;
ELECTRON IRRADIATION;
LOW ENERGY ELECTRON DIFFRACTION;
PYROLYSIS;
REACTION KINETICS;
TEMPERATURE PROGRAMMED DESORPTION;
ELECTRON INDUCED REACTIONS;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0033320791
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(99)00959-0 Document Type: Article |
Times cited : (4)
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References (33)
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