Development of a 2 kHz F2 laser for 157 nm lithography

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 B, 1999, Pages 7013-7016

  Nagai, Shinji ^a   Takehisa, Kiwamu ^a   Enami, Tatsuo ^a   Nishisaka, Toshihiro ^a   Fujimoto, Junichi ^a   Wakabayashi, Osamu ^a   Mizoguchi, Hakaru ^a   Takahashi, Akihiko ^b  

^a KOMATSU LTD   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

157 nm; F2; Lithography; Molecular fluorine laser; Post ArF; VUV

Indexed keywords

PHOTOLITHOGRAPHY; PULSED LASER APPLICATIONS;

MOLECULAR FLUORINE LASERS;

NANOTECHNOLOGY;

EID: 0033316165     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.7013     Document Type: Article

References (15)

1. J. K.Rice, A. K.Hays and J. R. Woodworth: Appl. Phys. Lett. 31 (1977) 31.
2. H. G. Craighead, J. C. White, R. E. Howard, L. D. Jackel, R. E. Behringer, J. E. Sweeney and R. W. Epworth: J. Vac. Sci. & Technol. B 1 (1983) 1186.
3. J. C. White, H. G. Craighead, R. E. Howard, L. D. Jacket, R. E. Beliringer, R. W. Epworth, D. Henderson and J. E. Sweeney: Appl. Phys. Lett. 44 (1984) 22.
4. Lambda Highlights No. 51, by Lambda Physik GmbH, March (1997).
5. M. Kakehata, E. Hashimoto, F. Kannnari and M. Obara: Appl. Phys. Lett. 56 (1990) 2599.
6. K. Yamada, K. Miyazaki, T. Hasama and T. Sato: Appl. Phys. Lett. 54 (1989) 597.
7. T. J. McKee: Can. J. Phys. 63 (1985) 214.
8. T. Hofmann, J. M. Hueber, P. Das and S. Scholler: Proc. SPIE 3679 (1999) 3679.
9. G. P. Callahan and B. K. Flint: Proc. SPIE 3578 (1998) 45.
10. T. M. Bloomstein, M. W. Horn, M. Rothschild, R. R. Kunz, S. T. Palmacci and R. B. Goodman: J. Vac. Sci. & Technol. B 15 (1997) 2112.
11. M. Ohwa and M. Obara: Appl. Phys. Lett. 51 (1987) 958.
12. M. Kakehata, T. Uematsu, F. Kannari and M. Obara: IEEE J. Quant. Electron. QE-27 (1991) 2456.
13. A. Takahashi: private communication.
14. M. Maeda, A. Takahashi, T. Mizunami and Y. Miyazoc: Jpn. J. Appl. Phys. 21 (1982) 1161.
15. T. Enami, O. Wakabayashi, T. Nishisaka, N. Suzuki, T. Nire, H. Mizoguchi, H. Nakarai, H. Tanaka, T. Ariga, K. Shio and T. Okamoto: Proc. SPIE 3334 (1998) 1031.