High spectral purity and high durability kHz KrF excimer laser with advanced RF pre-ionization discharge

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3334, Issue , 1998, Pages 1031-1040

  Enami, Tatsuo ^a   Wakabayashi, Osamu ^a   Nishisaka, Toshihiro ^a   Suzuki, Natsushi ^a   Nire, Takashi ^a   Mizoguchi, Hakaru ^a   Nakarai, Hiroaki ^b   Tanaka, Hirokazu ^b   Ariga, Tatsuya ^b   Shio, Kouji ^b   Okamoto, Takeshi ^b   Nodomi, Ryoichi ^b   Tomaru, Hitoshi ^b   Nakao, Kiyoharu ^b  

^a Research Div   (Japan)

^b KOMATSU LTD   (Japan)

Author keywords

DUV; Excimer laser; Preionization; Spectral bandwidth

Indexed keywords

BANDWIDTH; DURABILITY; EXCIMER LASERS; FLUORINE; GAS LASERS; IONIZATION OF GASES; KRYPTON; LASERS; TELECOMMUNICATION SYSTEMS;

DUV; EXCIMER LASER; FLUORINE GAS; HIGH-SPECTRAL-PURITY; KRF EXCIMER LASERS; LASER TUBE; OUTPUT POWERS; POWER MODULES; PREIONIZATION; RADIO FREQUENCY (RF); SOLID STATES; SPECTRAL BANDWIDTH;

PULSED LASER APPLICATIONS;

EID: 0003299196     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.310733     Document Type: Conference Paper

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