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Volumn 438, Issue 1-3, 1999, Pages 116-122
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Solid-phase epitaxial growth of CoSi2 on clean and oxygen-adsorbed Si(001) surfaces
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
ANNEALING;
COBALT ALLOYS;
INTERFACIAL ENERGY;
SCANNING TUNNELING MICROSCOPY;
SEMICONDUCTING FILMS;
SEMICONDUCTING SILICON;
SURFACE ACTIVE AGENTS;
SURFACE PHENOMENA;
TEMPERATURE;
COBALT DISILICIDE;
ENERGETICS;
SOLID PHASE GROWTH;
STRANSKI-KRASTANOV MODE;
EPITAXIAL GROWTH;
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EID: 0033315220
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(99)00559-2 Document Type: Article |
Times cited : (22)
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References (13)
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