Island-density and size dynamics in ion-assisted atomic deposition

Vacuum

Volumn 55, Issue 3, 1999, Pages 235-247

  Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DISSOCIATION; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; NUCLEATION; NUMERICAL METHODS; SPUTTER DEPOSITION;

ION ASSISTED ATOMIC DEPOSITION; ION IRRADIATION; MUTATION RATE EQUATIONS;

ION BOMBARDMENT;

EID: 0033310079     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(99)00162-1     Document Type: Article

References (69)

1. Glocker DA, Ismat Shah S, editors. Handbook of thin film process technology. Bristol: Institute of Physics, 1995.
2. Cuomo JJ, Rossnagel SM, Kaufman HR, editors. Handbook of ion beam processing technology. Park Ridge, NJ: Noyes, 1989.
3. Rossnagel SM, Cuomo JJ, Westwood WD, editors. Handbook of plasma processing technology. Park Ridge, NJ: Noyes, 1990.
4. Itoh T, editor. Ion beam assisted film growth. Beam modification of materials 3. Amsterdam: Elsevier, 1989.
5. Orrman-Rossiter KJ, Al-Bayati AH, Armour DG, Donnelly SE, van denBerg JA. Nucl Instr Meth B 1991;59/60:197.
6. Marton D, Boyd KJ, Rabalais JW. J Vac Sci Technol A 1998;16:1321.
7. Thornton JA. Ann Rev Mat Sci 1977;7:239.
8. Movchan BA, Demchishin AV. Phys Met Metalogr 1969;28:83.
9. Harper JME, Cuomo JJ, Gambino RJ, Kaufman HR. Ion Bombardment Modification of Surfaces: Fundamentals and Applications. In: Auciello O, Kelly R, editors. Amsterdam: Elsevier, 1984.
10. Marinov M. Thin Solid Films 1977;46:267.
11. Hasan M-A, Knall J, Barnett SA, Rockett A, Sundgren J-E, Greene JE. J Vac Sci Technol A 1987;5:1883.
12. Chason E, Bedrossian P, Houston JE, Tsao JY, Dodson BW, Picraux ST. Appl Phys Lett 1991;59:3533.
13. Chason E, Dodson BW. J Vac Sci Technol A 1991;9:1545.
14. Chason E, Kellerman BK. Nucl Instr Meth B 1999;127/128:225.
15. Bradley RM, Harper JME, Smith DA. J Appl Phys 1986;60:4160.
16. For a general review see; Barabasi A-L, Stanley HE. Fractal concepts in surface growth. Cambridge: Cambridge Univ.Press, 1995.
17. Amar JA, Family F, Lam P-M. Phys Rev B 1994;50:8781.
18. Vicsek T, Family F. Phys Rev Lett 1984;52:1669.
19. Family F, Meakin P. Phys Rev Lett 1988;61:428.
20. Meakin P, Vicsek T, Family F. Phys Rev B 1985;31:564.
21. Botet R, Jullien R. J Phys A 1984;17:2517.
22. Family F, Meakin P, Vicsek T. J Chem Phys 1985;83:4144.
23. Meakin P. In: Lebowitz J, Domb C, editors. Phase Transitions and Critical Phenomena, Vol 12. New York: Academic, 1988.
24. Family F, Meakin P, Deutch JM. Phys Rev Lett 1986;57:727.
25. Family F, Meakin P. Phys Rev A 1989;40:3836.
26. Zinke-Allmang M, Feldman LC, van Saarloos W. Phys Rev Lett 1992;68:2358.
27. Amar JG, Family F, Lam P-M. In: Mechanisms of Thin Film Evolution, Yasilove SM, Thompson CV, Eaglesham DJ, Editors. MRS Symposia Proceedings, Vol. 317. Pittsburgh: Materials Research Society, 1994.
28. Barkema GT, Biham O, Breeman M, Boerma DO, Vidali G. Surf Sci 1994;306:L569.
29. Blackman A, Wilding A. Europhys Lett 1991;16:115.
30. Venables JA. Philos Mag 1973;27:697.
31. Jensen P, Barabasi A-L, Larralde H, Havlin S, Stanley HE. Phys Rev B 1994;50:15316.
32. Smoluchowski M. Z Phys Chem 1916;17:557.
33. Smoluchowski M. Z Phys Chem 1917;92:129.
34. Bedrossian P, Houston JE, Tsao JY, Chason E, Picraux ST. Phys Rev Lett 1991;67:124.
35. Michely T, Besocke KH, Comsa G. Surf Sci Lett 1990;230:L135.
36. Michely T, Comsa G. Nucl Instr Meth B 1993;82:207.
37. Bedrossian P, Klitsner T. Phys Rev B 1991;44:13783.
38. Pechman RJ, Wang X-S, Weaver JH. Phys Rev B 1995;51:109929.
39. Schwoebel RL. J Appl Phys 1968;40:614.
40. Lane GE, Anderson JC. Thin Solid Films 1975;26:5.
41. Lane GE, Anderson JC. Thin Solid Films 1979;57:277.
42. Zinsmeister G. Thin Solid Films 1968;2:497.
43. Lewis B. Surf Sci 1970;21:273.
44. Andersen HH. Appl Phys 1979;18:131.
45. Muller K-H. Surf Sci 1987;184:L375.
46. Carter G, Cruz SA. Rad Effects Lett 1981;58:125.
47. Andersen HH, Bay HL. In: Behrisch R, editor. Sputtering by particle bombardment 2. Topics in applied physics, Vol. 47. Berlin: Springer, 1981.
48. Muller K-H. Phys Rev B 1987;35:7906.
49. Muller K-H. J Vac Sci Technol A 1987;5:2161.
50. Muller K-H. J Appl Phys 1985;58:2573.
51. Kitabatake M, Fons P, Greene JE. J Vac Sci Technol A 1991;9:91.
52. Donahue TJ, Reif R. Semicond Int 1985; 142.
53. Krikorian E, Sneed RJ. Astrophys Space Sci 1979;65:129.
54. Chapman BN, Campbell DS. J Phys C 1969;2:200.
55. Harsdorff M, Jark W. Thin Solid Films 1985;128:79.
56. Meakin P, Ernst MH. Phys Rev Lett 1988;60:2503.
57. Sillanpaa J, Koponen I. Nucl Instr Meth B 1988;142:67.
58. Rusanen M, Koponen I, Heinonen J, Sillanpaa J. Nucl Instr Meth B 1999;148:116.
59. Esch S, Bott M, Michely T, Comsas G. Appl Phys Lett 1995;67:3209.
60. Esch S, Breeman M, Morgenstern M, Michely T, Comsa G. Surf Sci 1996;365:187.
61. Kalff M, Breeman M, Morgenstern M, Michely T, Comsa G. Appl Phys Lett 1997;70:182.
62. Wehner GK, Hajicek DJ. J Appl Phys 1971;42:1145.
63. Rossnagel SM, Robinson RS. Rad Effects Lett 1981;58:11.
64. Robinson RS. PhD thesis Colorado State University, 1979.
65. Kaufman HR, Robinson RS. J Vac Sci Technol 1979;16:175.
66. Rosnagel SM, Robinson RS. J Vac Sci Technol 1982;20:506.
67. Rossnagel SM. In: Kiriakides G, Carter G, Whitton JL, Editors. Erosion and growth of solids stimulated by atom and ion beams, NATO ASI Series E, Vol. 112. Dordrecht: Martinus Nijhoff, (1986). p. 181.
68. Carter G. In: Kiriakides G, Carter G, Whitton JL. Editors. Erosion and growth of solids stimulated by atom and ion beams. NATO ASI Series E, Vol. 112. Dordrecht: Martinus Nijhoff, 1986. p. 70.
69. Shimizu H, Ono M, Koyami N, Ishida Y. J Appl Phys 1982;53:3044.